2 Torr Full Scale, temperature controlled up to 200°C (heated), 1/2" thread, Measuring accuracy of 0,4% of the measured value, Ideal in combination with pressure control valve due to P-Control, Corrosion-resistant ceramic technology, Stable process monitoring, Minimal zero-point drift, Outstanding long-term and temperature stability, Calibration test report included in delivery, SEMI S2 Conform