ATH 3204 M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 3050 l/s for N2

Product description

  • Integrated drive electronics
  • Installation in any orientation
  • Water cooled
  • CE marked and ROHS compliant
  • Heated version (MT) available for corrosive applications.
  • ATH-M large size turbomolecular pump has been introduced for silicon based industry applications, based on long experience for DN320 flange size


Your local contact
Pfeiffer Vacuum Ltd
16 Plover Close, Interchange Park
MK16 9PS Newport Pagnell
United Kingdom

+44 1908 500600
+44 1908 500601
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