Corrosive version (PFPE)

These corrosive versions of our rotary vane pumps are prepared for operation with Pfeiffer Vacuum perfluoropolyether (PFPE) operating fluids. Due to the inert operating fluid, these pumps can be used in highly corrosive processes. PFPE operating fluids must be ordered separately.

Applications

  • CVD coating
  • Coating (wear protection)
  • Semiconductor technology
  • Research and development

Customer value

  • Space-saving and ideal for systems integration
  • High pumping speeds with small dimensions
  • Low ultimate pressure
  • Operational safety, uses special materials for contact with corrosive substances
  • Longer useful life through use of chemically inert operating fluid

Pascal 2010 C2 (10 m3/h)

  • Increased resistance thanks to special materials
  • Very low ultimate pressure, ideal for medium vacuum applications
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids

Pascal 2015 C2 (15 m3/h)

  • Increased resistance thanks to special materials
  • Very low ultimate pressure, ideal for medium vacuum applications
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids

Pascal 2021 C2 (21 m3/h)

  • Increased resistance thanks to special materials
  • Very low ultimate pressure, ideal for medium vacuum applications
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids

Duo 35 C

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • Optionally with magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids

Duo 65 C

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • Optionally with magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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