A 200 L
Based on A 100 L design, A 200 L meets higher pumping capacity as well as very high pumping cycles. The pump does not require any on-site preventive maintenance and equals A 100 L reliability, with a MTBF of more than 195,000 hours.
- Load lock chamber and transfer chamber in semiconductor industry
- Load lock and sputtering chamber in solar photovoltaic applications
- Cryogenic applications and use in fundamental research laboratories
- Industry (cryogenic, gas manufacturers, laser sources)
- High performance
- Energy Efficient
- Low vibration and noise level
- Plug and play system: integrated monitoring
- Optional RS-232/RS-485 interface
- High pumping cycle frequency of small load lock
- High pumping speed 200 m3/h
- Maximum cycling frequency (20 l volume) : 300 cycles per hour
- Pump is equipped with water cooling circuit.
- Hour counter and three color LEDs provide information about pump status on its front panel