Today we have an ever increasing demand for technical gases. Next to general industry gases like nitrogen or argon, high purity gases are becoming more and more important. High purity gases are used in various application such as lasers, ion implantation, plasma etching of silicon, leak detection, blood gas analysis and more. To achieve the high purity of a gas, vacuum is required.
- High leak tightness
- Fast pump down
- Clean vacuum and special versions for explosive or corrosive gases
How does it work?
The gas centers receive the gases in liquid state. The gases are than condensed and filled into smaller gas bottles which is done by a filling machine. Each filling machine is equipped with vacuum pumps which have the purpose to evacuate the bottle before being filled with the gas. Depending on the purity of the gas, the vacuum level differs. In general: the purer the gas, the lower the end pressure. Usual pressure ranges are in the rough and fine vacuum range. One problem at the evacuation is the fact that the gas bottles need to be evacuated through a small capillary at the top of the bottle. This small conductance value can have huge effects on the pump down time and needs to be considered especially if a low pressure needs to be achieved for high purity gases.
Pfeiffer Vacuum can offer different pumps for bottle filling. In most cases, either multistage Roots pumps or sometimes rotary vane pumps are used. Depending on the gas type, we manufacture light gas, corrosive gas and ATEX versions next to our standard pumps. We also offer pressure gauges, mass spectrometer systems for residual gas analysis, leak detectors as well as valves and vacuum components.