The ActiveLine family includes three control units and eight active vacuum gauges with 0 – 10 volt analog outputs. All transmitters are equipped with identical connector assemblies and can therefore be operated with the same measurement cable on the control units. Measurement cables are available in standard lengths of 1 to 50 meters.
The active piezo vacuum gauges APR cover five measurement ranges from 5.5 MPa (55 bar) to 10 Pa (0.1 mbar) with six models.
Capacitive diaphragm vacuum gauges CMR are available in the form of both temperature-compensated and temperature-regulated versions, in five measurement ranges each from 1100 hPa – 10-5 hPa. The use of diaphragms with different rated values (full scale = F.S.) results in the following categories:
These ceramic-technology gauges from Pfeiffer Vacuum have a proven track record in many, especially corrosive applications.
For use in microtechnology with its commonly used units of Torr and mTorr, capacitive diaphragm vacuum gauges CCR can be supplied with rated values in Torr:
The CCR series has D-Sub connector assemblies and its power supply and output voltages are compatible with other commercial capacitive transmitters. Due to these features, however, they cannot be operated with ActiveLine control units.
The range of single-sensor ActiveLine transmitters is rounded off with two active Pirani vacuum gauges TPR for the medium vacuum range of 1,000 hPa to 5 · 10-5 hPa and three active cold cathode vacuum gauges IKR with measuring ranges of 10-2 to 5 · 10-11 hPa.
The TPR Pirani gauges can also be connected to DCU pumping station display control units, thus providing a pressure reading at no additional expense.
The electrodes (anode, cathode, collector) in the sensor of the active hot cathode vacuum gauge IMR 265 are designed with extremely small clearances between each other. Molecular flow therefore prevails, even at pressures p < 10-2 hPa, enabling ion currents there to be measured. An additional advantage of this transmitter is its lower sensitivity to contamination than the Bayard-Alpert design which makes it very suitable for controlling vacuum processes that are primarily in the lower medium vacuum range.
The following active vacuum gauges with combination sensors are available:
ActiveLine gauges offer the following advantages:
Coverage of the entire vacuum range
Figure 5.10: ActiveLine application concepts